@misc{indiciaee24597149312,
  title = {Dispersion engineered high-Q silicon Nitride Ring-Resonators via Atomic Layer Deposition},
  author = {Johann Riemensberger and Klaus Hartinger and Tobias Herr and Victor Brasch and Ronald Holzwarth and Tobias J. Kippenberg},
  year = {2012},
  doi = {10.1364/oe.20.027661},
  url = {https://arxiv.org/abs/1207.3841},
  note = {Source identifier: 1207.3841}
}