TY  - RPRT
TI  - Dispersion engineered high-Q silicon Nitride Ring-Resonators via Atomic Layer Deposition
AU  - Johann Riemensberger
AU  - Klaus Hartinger
AU  - Tobias Herr
AU  - Victor Brasch
AU  - Ronald Holzwarth
AU  - Tobias J. Kippenberg
PY  - 2012
DO  - 10.1364/oe.20.027661
UR  - https://arxiv.org/abs/1207.3841
ID  - 1207.3841
ER  -