TY - RPRT TI - Simulations of electromagnetic effects in high frequency capacitively coupled discharges using the Darwin approximation AU - Denis Eremin AU - Torben Hemke AU - Ralf Peter Brinkmann AU - Thomas Mussenbrock PY - 2012 DO - 10.1088/0022-3727/46/8/084017 UR - https://arxiv.org/abs/1208.3627 ID - 1208.3627 ER -