@misc{indiciae4a2310f01c70,
  title = {Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry},
  author = {A. Kato and S. Burger and F. Scholze},
  year = {2012},
  doi = {10.1364/ao.51.006457},
  url = {https://arxiv.org/abs/1208.4220},
  note = {Source identifier: 1208.4220}
}