TY  - RPRT
TI  - Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry
AU  - A. Kato
AU  - S. Burger
AU  - F. Scholze
PY  - 2012
DO  - 10.1364/ao.51.006457
UR  - https://arxiv.org/abs/1208.4220
ID  - 1208.4220
ER  -