@misc{indiciaed776612bfd42,
  title = {ICP polishing of silicon for high quality optical resonators on a chip},
  author = {A. Laliotis and M. Trupke and J. P. Cotter and G. Lewis and M. Kraft and E. A. Hinds},
  year = {2012},
  doi = {10.1088/0960-1317/22/12/125011},
  url = {https://arxiv.org/abs/1208.5647},
  note = {Source identifier: 1208.5647}
}