TY  - RPRT
TI  - ICP polishing of silicon for high quality optical resonators on a chip
AU  - A. Laliotis
AU  - M. Trupke
AU  - J. P. Cotter
AU  - G. Lewis
AU  - M. Kraft
AU  - E. A. Hinds
PY  - 2012
DO  - 10.1088/0960-1317/22/12/125011
UR  - https://arxiv.org/abs/1208.5647
ID  - 1208.5647
ER  -