@misc{indiciae171912f659f8,
  title = {Cavity optomechanics with Si3N4 membranes at cryogenic temperatures},
  author = {T. P. Purdy and R. W. Peterson and P. -L. Yu and C. A. Regal},
  year = {2012},
  doi = {10.1088/1367-2630/14/11/115021},
  url = {https://arxiv.org/abs/1208.6560},
  note = {Source identifier: 1208.6560}
}