TY  - RPRT
TI  - Cavity optomechanics with Si3N4 membranes at cryogenic temperatures
AU  - T. P. Purdy
AU  - R. W. Peterson
AU  - P. -L. Yu
AU  - C. A. Regal
PY  - 2012
DO  - 10.1088/1367-2630/14/11/115021
UR  - https://arxiv.org/abs/1208.6560
ID  - 1208.6560
ER  -