@misc{indiciae0c69d2eed55d,
  title = {Comb-drive MEMS Oscillators for Low Temperature Experiments},
  author = {M. Gonzalez and P. Zheng and E. Garcell and Y. Lee and H. B. Chan},
  year = {2013},
  url = {https://arxiv.org/abs/1209.0826},
  note = {Source identifier: 1209.0826}
}