@misc{indiciae6047fa7f09ac,
  title = {Infrared dielectric properties of low-stress silicon nitride},
  author = {Giuseppe Cataldo and James A. Beall and Hsiao-Mei Cho and Brendan McAndrew and Michael D. Niemack and Edward J. Wollack},
  year = {2012},
  doi = {10.1364/ol.37.004200},
  url = {https://arxiv.org/abs/1209.2987},
  note = {Source identifier: 1209.2987}
}