@misc{indiciae2813802b82b2,
  title = {Characterization and In-situ Monitoring of Sub-stoichiometric Adjustable Tc Titanium Nitride Growth},
  author = {Michael R. Vissers and Jiansong Gao and Jeffrey S. Kline and Martin Sandberg and Martin P. Weides and David S. Wisbey and David P. Pappas},
  year = {2012},
  doi = {10.1016/j.tsf.2013.07.046},
  url = {https://arxiv.org/abs/1209.4626},
  note = {Source identifier: 1209.4626}
}