TY  - RPRT
TI  - Characterization and In-situ Monitoring of Sub-stoichiometric Adjustable Tc Titanium Nitride Growth
AU  - Michael R. Vissers
AU  - Jiansong Gao
AU  - Jeffrey S. Kline
AU  - Martin Sandberg
AU  - Martin P. Weides
AU  - David S. Wisbey
AU  - David P. Pappas
PY  - 2012
DO  - 10.1016/j.tsf.2013.07.046
UR  - https://arxiv.org/abs/1209.4626
ID  - 1209.4626
ER  -