@misc{indiciaef2aff7d70998,
  title = {Elemental distribution and oxygen deficiency of magnetron sputtered ITO films},
  author = {Annett Thøgersen and Margrethe Rein and Edouard Monakhov and Jeyanthinath Mayandi and Spyros Diplas},
  year = {2012},
  doi = {10.1063/1.3587174},
  url = {https://arxiv.org/abs/1210.0035},
  note = {Source identifier: 1210.0035}
}