TY  - RPRT
TI  - Elemental distribution and oxygen deficiency of magnetron sputtered ITO films
AU  - Annett Thøgersen
AU  - Margrethe Rein
AU  - Edouard Monakhov
AU  - Jeyanthinath Mayandi
AU  - Spyros Diplas
PY  - 2012
DO  - 10.1063/1.3587174
UR  - https://arxiv.org/abs/1210.0035
ID  - 1210.0035
ER  -