@misc{indiciae903e0c536541,
  title = {Sub-μm Josephson Junctions for Superconducting Quantum Devices},
  author = {J. M. Meckbach and M. Merker and S. J. Buehler and K. Ilin and B. Neumeier and U. Kienzle and E. Goldobin and R. Kleiner and D. Koelle and M. Siegel},
  year = {2012},
  doi = {10.1109/tasc.2012.2231719},
  url = {https://arxiv.org/abs/1210.1012},
  note = {Source identifier: 1210.1012}
}