@misc{indiciae505c70360766,
  title = {Thin n-in-p pixel sensors and the SLID-ICV vertical integration technology for the ATLAS upgrade at the HL-LHC},
  author = {A. Macchiolo and L. Andricek and M. Ellenburg and H. G. Moser and R. Nisius and R. H. Richter and S. Terzo and P. Weigell},
  year = {2012},
  doi = {10.1016/j.nima.2013.04.077},
  url = {https://arxiv.org/abs/1210.7933},
  note = {Source identifier: 1210.7933}
}