@misc{indiciae87ea149f2d88,
  title = {Full field chemical imaging of buried native sub-oxide layers on doped silicon patterns},
  author = {F. de la Peña and N. Barrett and L. F. Zagonel and M. Walls and O. Renault},
  year = {2012},
  doi = {10.1016/j.susc.2010.06.006},
  url = {https://arxiv.org/abs/1211.4724},
  note = {Source identifier: 1211.4724}
}