TY  - RPRT
TI  - Full field chemical imaging of buried native sub-oxide layers on doped silicon patterns
AU  - F. de la Peña
AU  - N. Barrett
AU  - L. F. Zagonel
AU  - M. Walls
AU  - O. Renault
PY  - 2012
DO  - 10.1016/j.susc.2010.06.006
UR  - https://arxiv.org/abs/1211.4724
ID  - 1211.4724
ER  -