TY - RPRT TI - Physical limitations in ferromagnetic inductively coupled plasma sources AU - Yury P. Bliokh AU - Joshua Felsteiner AU - Yakov Z. Slutsker PY - 2012 DO - 10.1063/1.4793280 UR - https://arxiv.org/abs/1211.5626 ID - 1211.5626 ER -