@misc{indiciaee718fe9ea56f,
  title = {Unexpected Surface Implanted Layer in Static Random Access Memory Devices Observed by Microwave Impedance Microscope},
  author = {Worasom Kundhikanjana and Yongliang Yang and Qiaochu Tang and Kun Zhang Keji Lai and Yue Ma and Mike Kelly and Xinxin Li and Zhi-Xun Shen},
  year = {2012},
  doi = {10.1088/0268-1242/28/2/025010},
  url = {https://arxiv.org/abs/1212.1655},
  note = {Source identifier: 1212.1655}
}