TY  - RPRT
TI  - Unexpected Surface Implanted Layer in Static Random Access Memory Devices Observed by Microwave Impedance Microscope
AU  - Worasom Kundhikanjana
AU  - Yongliang Yang
AU  - Qiaochu Tang
AU  - Kun Zhang Keji Lai
AU  - Yue Ma
AU  - Mike Kelly
AU  - Xinxin Li
AU  - Zhi-Xun Shen
PY  - 2012
DO  - 10.1088/0268-1242/28/2/025010
UR  - https://arxiv.org/abs/1212.1655
ID  - 1212.1655
ER  -