@misc{indiciae566daf27e994,
  title = {Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5},
  author = {R. Hollerweger and D. Holec and J. Paulitsch and R. Rachbauer and P. Polcik and P. H. Mayrhofer},
  year = {2012},
  doi = {10.1088/0022-3727/46/33/335203},
  url = {https://arxiv.org/abs/1212.4089},
  note = {Source identifier: 1212.4089}
}