@misc{indiciae4f238be1472a, title = {III-V Gate-all-around Nanowire MOSFET Process Technology: From 3D to 4D}, author = {J. J. Gu and X. W. Wang and J. Shao and A. T. Neal and M. J. Manfra and R. G. Gordon and P. D. Ye}, year = {2012}, url = {https://arxiv.org/abs/1212.4225}, note = {Source identifier: 1212.4225} }