@misc{indiciaec092d66c0541,
  title = {Microwave properties of superconducting atomic-layer deposited TiN films},
  author = {P. C. J. J. Coumou and M. R. Zuiddam and E. F. C. Driessen and P. J. de Visser and J. J. A. Baselmans and T. M. Klapwijk},
  year = {2012},
  doi = {10.1109/tasc.2012.2236603},
  url = {https://arxiv.org/abs/1212.4434},
  note = {Source identifier: 1212.4434}
}