@misc{indiciaed94007efff9b,
  title = {Broadband Terahertz Modulators based on MEMS-Reconfigurable Mesh Filters},
  author = {Mehmet Unlu and Mohammad R. Hashemi and Christopher W. Berry and Shenglin Li and Shang-Hua Yang and Mona Jarrahi},
  year = {2013},
  doi = {10.1038/srep05708},
  url = {https://arxiv.org/abs/1212.6562},
  note = {Source identifier: 1212.6562}
}