@misc{indiciae0075b7c1e7bf,
  title = {Image Registration for Stability Testing of MEMS},
  author = {Nargess Memarsadeghi and Jacqueline Le Moigne and Peter N. Blake and Peter A. Morey and Wayne B. Landsman and Victor J. Chambers and Samuel H. Moseley},
  year = {2013},
  doi = {10.1117/12.872076},
  url = {https://arxiv.org/abs/1301.1897},
  note = {Source identifier: 1301.1897}
}