@misc{indiciaed9a44b33603a,
  title = {Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging},
  author = {Yongliang Yang and Keji Lai and Qiaochu Tang and Worasom Kundhikanjana and Michael A Kelly and Kun Zhang and Zhi-xun Shen and Xinxin Li},
  year = {2013},
  url = {https://arxiv.org/abs/1301.2402},
  note = {Source identifier: 1301.2402}
}