@misc{indiciae742ad2785cdb,
  title = {Development of low frequencies, insulating thick diaphragms for power MEMS applications},
  author = {Fabien Formosa and Adrien Badel and Hugues Favrelière},
  year = {2013},
  doi = {10.1016/j.sna.2012.09.018},
  url = {https://arxiv.org/abs/1301.4589},
  note = {Source identifier: 1301.4589}
}