TY  - RPRT
TI  - Development of low frequencies, insulating thick diaphragms for power MEMS applications
AU  - Fabien Formosa
AU  - Adrien Badel
AU  - Hugues Favrelière
PY  - 2013
DO  - 10.1016/j.sna.2012.09.018
UR  - https://arxiv.org/abs/1301.4589
ID  - 1301.4589
ER  -