@misc{indiciaebb66f279964b,
  title = {Variable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants},
  author = {Dieter Weber and Róza Vöfély and Yuehua Chen and Yulia Mourzina and Ulrich Poppe},
  year = {2013},
  doi = {10.1016/j.tsf.2012.11.118},
  url = {https://arxiv.org/abs/1301.4828},
  note = {Source identifier: 1301.4828}
}