TY  - RPRT
TI  - Variable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants
AU  - Dieter Weber
AU  - Róza Vöfély
AU  - Yuehua Chen
AU  - Yulia Mourzina
AU  - Ulrich Poppe
PY  - 2013
DO  - 10.1016/j.tsf.2012.11.118
UR  - https://arxiv.org/abs/1301.4828
ID  - 1301.4828
ER  -