@misc{indiciae7d68c3d92e3f,
  title = {Fabrication of superconducting tantalum nitride thin films using infra-red pulsed laser deposition},
  author = {Saumyadip Chaudhuri and Lucie Chandernagor and Manu Lahtinen and Marion Ging and Ilari Maasilta},
  year = {2013},
  doi = {10.1116/1.4812698},
  url = {https://arxiv.org/abs/1302.4579},
  note = {Source identifier: 1302.4579}
}