TY  - RPRT
TI  - Fabrication of superconducting tantalum nitride thin films using infra-red pulsed laser deposition
AU  - Saumyadip Chaudhuri
AU  - Lucie Chandernagor
AU  - Manu Lahtinen
AU  - Marion Ging
AU  - Ilari Maasilta
PY  - 2013
DO  - 10.1116/1.4812698
UR  - https://arxiv.org/abs/1302.4579
ID  - 1302.4579
ER  -