TY  - RPRT
TI  - Sputter-Induced Cross-Contaminations in Analytical AES and XPS Instrumentation: Utilization of the effect for the In-situ Deposition of Ultrathin Functional Layers
AU  - Uwe Scheithauer
PY  - 2013
UR  - https://arxiv.org/abs/1302.6689
ID  - 1302.6689
ER  -