@misc{indiciaeea01bebb4959,
  title = {Ultra-Thin Free-Standing Single Crystalline Silicon Membranes With Strain Control},
  author = {Andrey Shchepetov and Mika Prunnila and Francesc Alzina and Lars Schneider and John Cuffe and Hua Jiang and Esko I. Kauppinen and Clivia M. Sotomayor Torres and Jouni Ahopelto},
  year = {2013},
  doi = {10.1063/1.4807130},
  url = {https://arxiv.org/abs/1303.1658},
  note = {Source identifier: 1303.1658}
}