@misc{indiciaebb48c8e0e1ca,
  title = {Simulation of electron transport in electron beam induced deposition of nanostructures},
  author = {Francesc Salvat-Pujol and Harald O. Jeschke and Roser Valenti},
  year = {2013},
  doi = {10.3762/bjnano.4.89},
  url = {https://arxiv.org/abs/1303.1739},
  note = {Source identifier: 1303.1739}
}