TY  - RPRT
TI  - Simulation of electron transport in electron beam induced deposition of nanostructures
AU  - Francesc Salvat-Pujol
AU  - Harald O. Jeschke
AU  - Roser Valenti
PY  - 2013
DO  - 10.3762/bjnano.4.89
UR  - https://arxiv.org/abs/1303.1739
ID  - 1303.1739
ER  -