@misc{indiciae67017f1250ae,
  title = {ASNOM mapping of SiC epi-layer doping profile and of surface phonon polariton waveguiding},
  author = {Dmitry Kazantsev},
  year = {2013},
  url = {https://arxiv.org/abs/1303.3175},
  note = {Source identifier: 1303.3175}
}