@misc{indiciae256936d7f1a9,
  title = {Low-Damage High-Throughput Grazing-Angle Sputter Deposition on Graphene},
  author = {Ching-Tzu Chen and Emanuele A. Casu and Martin Gajek and Simone Raoux},
  year = {2014},
  doi = {10.1063/1.4813911},
  url = {https://arxiv.org/abs/1303.3325},
  note = {Source identifier: 1303.3325}
}