TY  - RPRT
TI  - Low-Damage High-Throughput Grazing-Angle Sputter Deposition on Graphene
AU  - Ching-Tzu Chen
AU  - Emanuele A. Casu
AU  - Martin Gajek
AU  - Simone Raoux
PY  - 2014
DO  - 10.1063/1.4813911
UR  - https://arxiv.org/abs/1303.3325
ID  - 1303.3325
ER  -