@misc{indiciaebccbea7a8585,
  title = {Significance of the Casimir force and surface roughness for actuation dynamics of MEMS},
  author = {Wijnand Broer and George Palasantzas and Jasper Knoester and Vitaly B. Svetovoy},
  year = {2013},
  doi = {10.1103/physrevb.87.125413},
  url = {https://arxiv.org/abs/1303.3383},
  note = {Source identifier: 1303.3383}
}