TY  - RPRT
TI  - Significance of the Casimir force and surface roughness for actuation dynamics of MEMS
AU  - Wijnand Broer
AU  - George Palasantzas
AU  - Jasper Knoester
AU  - Vitaly B. Svetovoy
PY  - 2013
DO  - 10.1103/physrevb.87.125413
UR  - https://arxiv.org/abs/1303.3383
ID  - 1303.3383
ER  -