@misc{indiciaeb2b05297914a,
  title = {Fast simulation method for parameter reconstruction in optical metrology},
  author = {S. Burger and L. Zschiedrich and J. Pomplun and F. Schmidt and B. Bodermann},
  year = {2013},
  doi = {10.1117/12.2011154},
  url = {https://arxiv.org/abs/1304.4367},
  note = {Source identifier: 1304.4367}
}