@misc{indiciae9660bec1d0a6,
  title = {EUV induced defects on few-layer graphene},
  author = {A. Gao and P. J. Rizo and E. Zoethout and L. Scaccabarozzi and C. J. Lee and V. Banine and F. Bijkerk},
  year = {2013},
  doi = {10.1063/1.4817082},
  url = {https://arxiv.org/abs/1304.4395},
  note = {Source identifier: 1304.4395}
}