@misc{indiciae81084b6b5235,
  title = {Parameter Extraction and Support-Loss in MEMS Resonators},
  author = {P. G. Steeneken and J. J. M. Ruigrok and S. Kang and J. T. M. van Beek and J. Bontemps and J. J. Koning},
  year = {2013},
  url = {https://arxiv.org/abs/1304.7953},
  note = {Source identifier: 1304.7953}
}