@misc{indiciaeb0210d93d023,
  title = {Inductively Coupled Plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry},
  author = {Patrick Harvey-Collard and Abdelatif Jaouad and Dominique Drouin and Michel Pioro-Ladrière},
  year = {2013},
  doi = {10.1016/j.mee.2013.02.099},
  url = {https://arxiv.org/abs/1305.0589},
  note = {Source identifier: 1305.0589}
}