@misc{indiciae4188e56b5939,
  title = {Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis},
  author = {Mariana C. Prado and Deep Jariwala and Tobin J. Marks and Mark C. Hersam},
  year = {2013},
  doi = {10.1063/1.4807425},
  url = {https://arxiv.org/abs/1305.4428},
  note = {Source identifier: 1305.4428}
}