TY  - RPRT
TI  - Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis
AU  - Mariana C. Prado
AU  - Deep Jariwala
AU  - Tobin J. Marks
AU  - Mark C. Hersam
PY  - 2013
DO  - 10.1063/1.4807425
UR  - https://arxiv.org/abs/1305.4428
ID  - 1305.4428
ER  -