@misc{indiciae6d88d1687895, title = {Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration}, author = {Sunwoo Lee and Vivekananda P. Adiga and Robert A. Barton and Arend van der Zande and Gwan-Hyoung Lee and B. Rob Ilic and Alexander Gondarenko and Jeevak M. Parpia and Harold G. Craighead and James Hone}, year = {2013}, doi = {10.1021/nl4020414}, url = {https://arxiv.org/abs/1305.4852}, note = {Source identifier: 1305.4852} }